Piranha Etch SOP Piranha solution should be prepared and used only when necessary. to clean photoresist residue from silicon wafers.

5. Cleaning.

What is Piranha Etch and How is it Used.

Eats through most stuff. The cooled piranha solution may be transferred into the piranha waste bottle. After 1 h, quench the piranha solution by slowly adding MPH 2 O …

The > grad students in one lab used to rotate responsibility for cleaning all > of their glass frits by running piranha solution thru them (using "house > vacuum") into a filter flask.

Great (albeit dangerous) option for fritted glass. Which means it adds more -OH groups. After 10min the solution temperature usually reaches 60°C. Prepare the HCI bath in a polypropylene container by the following recipe: 200 ml DI water . It’s possible the device you’re listening to this podcast on was treated with it. Before using Aqua Regia, Piranha or other severe cleaning solutions for the first time, consult with more experienced labmates to ensure proper safety measures are followed. [7] Leave the solution to cool down (must be in an OPEN glass container).

Whenever handling Piranha, only use glass containers (Pyrex). Piranha solution and aqua regia are corrosive and may cause severe burns.

PIRANHA’CLEANING’–’GLASS’SURFACES’ ©Moran(MirabalResearchGroup" 3/3" keep)the)temperature)in)the)appropriate)range. *It is important to remember that this used piranha cleaning solution is still concentrated sulfuric acid with an … Try to avoid using Piranha if a less reactive reagent will work (NMP, Nano Strip, etc.).

Piranha solution is not recommended for routine cleaning of glassware and masks. Piranha solution is also used in the electronics industry to clean the photoresist residue off silicon wafers during the manufacture of printed circuit boards.

High quality silicon wafer cleaning equipment designed to handle the corrosive chemicals safely is required for carrying out piranha etch safely and effectively. Piranha solutions, as well as any corrosive or hazardous substances requires at all time the presence of a second knowledgeable user (buddy system). [10] Rinse the large beaker 3 times.

Carefully stir the solution with the glass stir rod every 20 min.

3-Piranha solution handling. Make only as much Aqua Regia and Piranha as you will need. Carefully add ~ 30 coverslips to the piranha solution. 2. Put the glass substrates into the bath to soak for 30 minutes. The use of heat and/or ultrasonic agitation can greatly improve the removal rate of many deposits, especially inorganic and crystalline deposits. Glass is not the only thing it cleans. A classic lab > accident with piranha solution occurred at Cornell in 1986 or so. When transferring make sure no heat is produced or reactions are occurring. 2.1.9Allow your samples to sit in the Piranha clean for 10-20 minutes to remove all organics. NEVER leave this solution unattended. SLOWLY dump the diluted Piranha solution into the sink under running water.

Larger batches of Aqua Regia and Piranha may be made as well in a glass container. Soak the wafers/samples in the solution for 10min. This is particularly important when the glassware isn’t clean – chemicals could get in the wounds. I use pirhana to clean glass fibers and slides for gold nanoparticle self-assembly experiments. Piranha solution should be contained in glass or Pyrex containers. Piranha can melt and even attack plastic containers.

Whilst the semiconductor industry use piranha solution ( refer Section After using Aqua Regia and Piranha, wash the floor of the fume hood and any glassware used to contain the cleaning solution with a sodium bicarbonate solution.

The solution will heat up to 80°C. 2.1.8Put your samples in the solution to etch. WARNING: usually acid has to be added at the end. necessary safety precautions for each cleaning solution should obtained before attempting to clean glassware. One student made the mistake of leaving a > trace of acetone in the flask.

100 ml HCI (add to water) Pour the water into the container then add the acid.

Piranha will melt plastics.

You are handling large amounts of glassware that is many times slippery from the cleaning solutions – be extra careful to avoid breaking anything and cutting yourself. Piranha is an exception: sulfuric acid has be added first and then slowly pour the peroxide. [8] Take a large glass beaker and half fill with water, pour the Piranha solution into water VERY SLOWLY. the glass.

Make sure that the coverslips do not float and keep them separated from each other using the glass stir rod. Be sure to label the container with the title “30% HCI solution” then add your name and the date.

2.1.7Cap the hydrogen peroxide bottle and put it away. Piranha solution is used frequently in the microelectronics industry, e.g. To Clean Sintered Glass - Piranha solution is used to clean sintered glass or fritted glass because it doesn't damage pores in the glass (which is why you don't use a strong base instead).